Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors
| Image |  |
|---|---|
| Description | scientific article |
| Author/s |
author: Hans-Werner Becker Harish Parala Detlef Rogalla Shashi Paul Richard Cross |
| Publication date | October 1, 2012 |
| Language | English |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |