Growth and Characterization of Al2O3 Atomic Layer Deposition Films on sp(2)-Graphitic Carbon Substrates Using NO2/Trimethylaluminum Pretreatment.
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| Description | scientific article published on 28 May 2015 |
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author: Steven M. George Matthias Young |
| Publication date | May 28, 2015 |
| Language | English |
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