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Plasma-Enhanced Chemical Vapor Deposition (PE-CVD) yields better Hydrolytical Stability of Biocompatible SiOx Thin Films on Implant Alumina Ceramics compared to Rapid Thermal Evaporation Physical Vapor Deposition (PVD).

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Description scientific article published on 7 July 2016
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author: Adrian Keller  Horst Fischer  Ignacio Giner 

Publication date July 7, 2016
Language English
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