Direct atomic fabrication and dopant positioning in Si using electron beams with active real-time image-based feedback
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| Description | scientific article published on 4 April 2018 |
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author: Jiaming Song Eva Zarkadoula Artem Maksov Albina Y. Borisevich Ivan Kravchenko Sergei V. Kalinin Stephen Jesse Miguel Fuentes-Cabrera |
| Publication date | April 4, 2018 |
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