Surface-Anchored Metal-Organic Frameworks as Versatile Resists for Gas-Assisted E-Beam Lithography: Fabrication of Sub-10 Nanometer Structures.
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| Description | scientific article published on 14 March 2018 |
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author: Christof Wöll Hubertus Marbach |
| Publication date | March 20, 2018 |
| Language | English |
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