Integral equation analysis and optimization of 2D layered nanolithography masks by complex images Green’s function technique in TM polarization
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| Description | scientific article published on May 1, 2012 |
| Author/s |
author: Reza Faraji-Dana |
| Publication date | May 1, 2012 |
| Language | English |
| Country of origin | |
| Wikipedia link | |
| Access work |
https://www.osapublishing.org/viewmedia.cfm?URI=josaa-29-5-748&seq=0 |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |