A Study on the Growth Behavior and Stability of Molecular Layer Deposited Alucone Films Using Diethylene Glycol and Trimethyl Aluminum Precursors, and the Enhancement of Diffusion Barrier Properties by Atomic Layer Deposited Al2O3 Capping.
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| Description | scientific article published on 27 April 2016 |
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| Publication date | May 4, 2016 |
| Language | English |
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