Spatial metrology of dopants in silicon with exact lattice site precision.
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| Description | scientific article published on 6 June 2016 |
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author: Lloyd Hollenberg Joseph Salfi Sven Rogge Muhammad Usman Michelle Simmons Juanita Bocquel |
| Publication date | June 6, 2016 |
| Language | English |
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| Missing/wrong data? | Edit Wikidata item |