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Electron beam directed etching of hexagonal boron nitride

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Description scientific article published on 6 September 2016
Author/s

author: Takashi Taniguchi  Miroslav Kolíbal  Toan Trong Tran  Charlene J. Lobo  Qiran Cai  Milos Toth  Igor Aharonovich  Kenji Watanabe  Lu Hua Li  Christopher Elbadawi 

Publication date September 6, 2016
Language English
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