High-resolution non-destructive three-dimensional imaging of integrated circuits
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| Description | scientific article published in March 2017 |
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author: Mirko Holler Manuel Guizar-Sicairos Joerg Raabe Gabriel Aeppli Oliver Bunk |
| Publication date | March 1, 2017 |
| Language | English |
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| Missing/wrong data? | Edit Wikidata item |