Effect of surface tension and coefficient of thermal expansion in 30 nm scale nanoimprinting with two flexible polymer molds
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| Description | scientific article published on May 17, 2012 |
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author: Dae-Geun Choi Kahp-Yang Suh |
| Publication date | May 17, 2012 |
| Language | English |
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| Missing/wrong data? | Edit Wikidata item |