A new procedure to seal the pores of mesoporous low-k films with precondensed organosilica oligomers.
| Image |  |
|---|---|
| Description | scientific article published on 30 January 2012 |
| Author/s | |
| Publication date | January 30, 2012 |
| Language | English |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |