Comparison of the Atomic Layer Deposition of Tantalum Oxide Thin Films Using Ta(NtBu)(NEt2)3, Ta(NtBu)(NEt2)2Cp, and H2O.
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| Description | scientific article published on 12 December 2016 |
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author: Deok-Yong Cho Cheol Seong Hwang Sang Woon Lee Sanjeev Gautam |
| Publication date | December 20, 2016 |
| Language | English |
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| Missing/wrong data? | Edit Wikidata item |