Unearthing [3-(Dimethylamino)propyl]aluminium(III) Complexes as Novel Atomic Layer Deposition (ALD) Precursors for Al2 O3 : Synthesis, Characterization and ALD Process Development.
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| Description | scientific article published on 30 June 2017 |
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author: Maximilian Gebhard Felix Mitschker Anjana Devi Lukas Mai |
| Publication date | July 24, 2017 |
| Language | English |
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