The residual pattern of double thin-film over-etching for the fabrication of continuous patterns with dimensions varying from 50 nm to millimeters over a large area
| Image |  |
|---|---|
| Description | scientific article published on 11 March 2008 |
| Author/s |
author: Chun Yang |
| Publication date | March 11, 2008 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |