Confocal signal evaluation algorithms for surface metrology: uncertainty and numerical efficiency
| Image |  |
|---|---|
| Description | scientific article published in July 2017 |
| Author/s |
author: Bernhard Roth |
| Publication date | July 1, 2017 |
| Language | English |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |