Reaction Mechanism of Area-Selective Atomic Layer Deposition for Al2O3 Nanopatterns.
| Image |  |
|---|---|
| Description | scientific article published on 7 November 2017 |
| Author/s |
author: Hyungjun Kim Jae-Min Myoung Sang Soo Han |
| Publication date | November 14, 2017 |
| Language | English |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |