Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle.
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| Description | scientific article published on 29 August 2017 |
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author: Adriaan Mackus Alfredo Mameli Wilhelmus M. M. Kessels Bora Karasulu |
| Publication date | September 7, 2017 |
| Language | English |
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| Missing/wrong data? | Edit Wikidata item |