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Speciation of CuCl and CuCl2 Thiol-Amine Solutions and Characterization of Resulting Films: Implications for Semiconductor Device Fabrication.

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Description scientific article
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author: Priya Murria  Hilkka Kenttämaa  Rakesh Agrawal  Ravikiran Yerabolu 

Publication date November 13, 2017
Language English
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