Zeolite-inspired low-k dielectrics overcoming limitations of zeolite films
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| Description | scientific article published in December 2008 |
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author: Jone Urrutia Abheesh N. Busawon Steliana Aldea Salvador Eslava Francesca Iacopi Christine Eva Antonia Kirschhock Johan A. Martens |
| Publication date | December 1, 2008 |
| Language | English |
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