Design and performance of capping layers for extreme-ultraviolet multilayer mirrors
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| Description | scientific article published on October 1, 2003 |
| Author/s |
author: Sasa Bajt |
| Publication date | October 1, 2003 |
| Language | English |
| Country of origin | |
| Wikipedia link | |
| Access work |
https://www.osapublishing.org/viewmedia.cfm?URI=ao-42-28-5750&seq=0 |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |