Influence of the plasma sheath on plasma polymer deposition in advance of a mask and down pores.
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| Description | scientific article published in June 2009 |
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author: Morgan R. Alexander David J Scurr Nikolaj Gadegaard Andrew J Urquhart |
| Publication date | June 1, 2009 |
| Language | English |
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| Missing/wrong data? | Edit Wikidata item |