Facile Encapsulation of Oxide based Thin Film Transistors by Atomic Layer Deposition based on Ozone
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| Description | scientific article published on April 17, 2013 |
| Author/s |
author: Thomas Riedl Patrick Görrn |
| Publication date | April 17, 2013 |
| Language | English |
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| Access work |
https://api.wiley.com/onlinelibrary/tdm/v1/articles/10.1002%2Fadma.201300549 |
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| Missing/wrong data? | Edit Wikidata item |