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Self-assembled titanium calcium oxide nanopatterns as versatile reactive nanomasks for dry etching lithographic transfer with high selectivity

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Description scientific article published on December 18, 2012
Author/s

author: Gilles Lerondel  Anne-Marie Haghiri-Gosnet  Andrea Cattoni 

Publication date December 18, 2012
Language English
Country of origin
Wikipedia link
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https://hal.archives-ouvertes.fr/hal-00759965/file/c2nr33341d.pdf

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