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Optimized electron beam writing strategy for fabricating computer-generated holograms based on an effective medium approach

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Description scientific article published on April 25, 2011
Author/s

author: Andreas Tünnermann  Thomas Kämpfe  Ernst-Bernhard Kley 

Publication date April 1, 2011
Language English
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https://doi.org/10.1364/oe.19.008684

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