High Density and Large Area Arrays of Silicon Oxide Pillars with Tunable Domain Size for Mask Etch Applications
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| Description | scientific article published on August 10, 2012 |
| Author/s |
author: Thomas Paul Russell |
| Publication date | August 10, 2012 |
| Language | English |
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| Access work |
https://api.wiley.com/onlinelibrary/tdm/v1/articles/10.1002%2Fadma.201201278 |
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| Missing/wrong data? | Edit Wikidata item |