Conformal SiO2 coating of sub-100 nm diameter channels of polycarbonate etched ion-track channels by atomic layer deposition.
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| Description | scientific article published on 16 February 2015 |
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author: Christina Trautmann María Eugenia Toimil-Molares Nicolas Sobel Manuela Lukas Bernd Stühn Christian Hess Anne Spende |
| Publication date | February 16, 2015 |
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