Importance of trimethylaluminum diffusion in three-step ABC molecular layer deposition using trimethylaluminum, ethanolamine, and maleic anhydride.
| Image |  |
|---|---|
| Description | scientific article published on 30 November 2010 |
| Author/s |
author: Steven M. George |
| Publication date | November 30, 2010 |
| Language | English |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |