Fabrication of buckling free ultrathin silicon membranes by direct bonding with thermal difference
| Image |  |
|---|---|
| Description | scientific article published on 25 March 2015 |
| Author/s |
author: Joëlle Margot |
| Publication date | March 25, 2015 |
| Language | English |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |