Direct Observation of the Thickness-Induced Crystallization and Stress Build-Up during Sputter-Deposition of Nanoscale Silicide Films.
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| Description | scientific article published on 6 December 2016 |
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author: Bärbel Krause Tilo Baumbach Anny Michel |
| Publication date | December 6, 2016 |
| Language | English |
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