Aberration-Corrected Electron Beam Lithography at the One Nanometer Length Scale
| Image |  |
|---|---|
| Description | scientific article |
| Author/s |
author: Eric Stach Chang-Yong Nam |
| Publication date | April 18, 2017 |
| Language | English |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |