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Nanometer scale elemental analysis in the helium ion microscope using time of flight spectrometry

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Description scientific article published on 24 December 2015
Author/s

author: John Notte  Gregor Hlawacek  Nico Klingner 

Publication date December 24, 2015
Language English
Country of origin
Wikipedia link
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https://archive.org/details/arxiv-1510.04594

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