A micro opto-mechanical displacement sensor based on micro-diffraction gratings: design and characterization
| Image |  |
|---|---|
| Description | scientific article |
| Author/s | |
| Publication date | January 1, 2013 |
| Language | English |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |