Non-Prestonian Behavior of Rectangular Shaped Ceria Slurry in Shallow Trench Isolation Chemical Mechanical Planarization
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| Description | scientific article published on March 1, 2012 |
| Author/s |
author: Paik Un-gyu |
| Publication date | March 1, 2012 |
| Language | English |
| Country of origin | |
| Wikipedia link | |
| Access work |
http://www.ingentaconnect.com/content/asp/jnn/2012/00000012/00000003/art00154 |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |