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Investigation of the analysis parameters and background subtraction for high-k materials with atom probe tomography

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Description scientific article published on December 29, 2010
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author: Stephan S.A. Gerstl 

Publication date December 29, 2010
Language English
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https://api.elsevier.com/content/article/PII:S0304399110003700?httpAccept=text/xml

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