Imaging thin films of nanoporous low-k dielectrics: comparison between ultramicrotomy and focused ion beam preparations for transmission electron microscopy
| Image |  |
|---|---|
| Description | scientific article |
| Author/s |
author: Matthew R Phillips |
| Publication date | April 1, 2006 |
| Language | English |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |