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Hydrogen plasma treatment of very thin p-type nanocrystalline Si films grown by RF-PECVD in the presence of B(CH3)3

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Description scientific article (publication date: August 2012)
Author/s

author: Elvira Fortunato  Hugo Águas  António Vicente  Sergej Filonovich  Andreia Araújo  Tito Busani  Joaquim P. Leitão  Rodrigo Martins  Diana Gaspar  Márcia Vilarigues 

Publication date August 2012
Language English
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