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Synthesis of silicon-carbon films by induction-assisted plasma-chemical deposition

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Description scientific article published in 2023
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author: Mikhail D Malinkovich  Yuriy N Parkhomenko  Nikolai Sobolev  Ilya V Kubasov  Andrei V Turutin  Dmitry A. Kiselev 

Publication date December 12, 2023
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