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Reduced dislocation density and residual tension in AlN grown on SiC by metalorganic chemical vapor deposition

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Description scholarly article
Author/s

author: Steven P. DenBaars  Shuji Nakamura 

Publication date October 14, 2019
Language English
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https://pubs.aip.org/apl/article/115/16/161101/37581/Reduced-dislocation-density-and-residual-tension

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