Effect of substrates on morphological evolution of a film in the silicon CVD process: approach by charged cluster model
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| Description | scholarly article |
| Author/s |
author: Doh-Yeon Kim Nong-Moon Hwang |
| Publication date | September 2000 |
| Language | English |
| Country of origin | |
| Wikipedia link | |
| Access work |
https://linkinghub.elsevier.com/retrieve/pii/S002202480000542X |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |