A route to engineered high aspect-ratio silicon nanostructures through regenerative secondary mask lithography
| Image |  |
|---|---|
| Description | scientific article published on 3 February 2022 |
| Author/s |
author: Martyna Michalska Ioannis Papakonstantinou Ivan P. Parkin Manish K Tiwari |
| Publication date | February 3, 2022 |
| Language | English |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |