Time‐resolved analysis of the precursor fragmentation kinetics in an hybrid PVD/PECVD dusty plasma with pulsed injection of HMDSO
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| Description | journal article from 'Plasma Processes and Polymers' published in 2019 |
| Author/s |
author: Kremena Makasheva Xavier Glad |
| Publication date | November 2019 |
| Language | English |
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