High-Definition Nanoimprint Stamp Fabrication by Atomic Layer Etching
| Image |  |
|---|---|
| Description | scientific article published on 22 May 2018 |
| Author/s |
author: Christoffer Kauppinen Jonas Sundqvist Marcel Junige Sabbir A Khan |
| Publication date | May 22, 2018 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |