The angle dependent <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si147.svg" display="inline" id="d1e710"><mml:mi>Δ</mml:mi></mml:math>E effect in TiN/AlN/Ni micro cantilevers
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| Description | scientific article published in 2022 |
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| Publication date | October 2022 |
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