Study of a novel ALD process for depositing MgF2 thin films
| Image |  |
|---|---|
| Description | scientific article |
| Author/s |
author: Mikko Ritala Timo Hatanpää Esa Puukilainen Kai Arstila Markku Leskela |
| Publication date | 2007 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |