In-situ annealing characterization of atomic-layer-deposited Al2O3 in N2, H2 and vacuum atmospheres
| Image |  |
|---|---|
| Description | scientific article |
| Author/s |
author: Timo Sajavaara Sami Suihkonen |
| Publication date | July 2019 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |