Al2O3 ALD films grown using TMA + rare isotope 2H216O and 1H218O precursors
| Image |  |
|---|---|
| Description | scientific article |
| Author/s |
author: Timo Sajavaara |
| Publication date | April 2021 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |