Missing/wrong data? Edit Wikidata item
Effect of deposition conditions on mechanical properties of low-temperature PECVD silicon nitride films
scientific article
Author/s
Work details
Publication date:
November 2006
Copyright status
Copyright status information is not available for this work. The copyright status depends on the jurisdiction, the author's date of death and the date the work was created or published.
To learn more about copyright terms in different countries, visit the countries and terms page.