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Nondestructive measurements of depth distribution of carrier lifetimes in 4H-SiC thick epitaxial layers using time-resolved free carrier absorption with intersectional lights

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Description scientific article published on 01 December 2020
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author: Kazutoshi Kojima  Tomohisa Kato  Hajime Okumura  Masashi Kato 

Publication date December 1, 2020
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