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Converting molecular layer deposited alucone films into Al<sub>2</sub>O<sub>3</sub>/alucone hybrid multilayers by plasma densification

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Description scientific article published on 22 December 2020
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author: Mikko Nisula  Jin Li  Juan Santo Domingo Peñaranda  Sofie S T Vandenbroucke  Jonas Keukelier  Jolien Dendooven  Andrea I Pitillas Martínez 

Publication date December 22, 2020
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